Antoni F Jakubiec

6722835, Apr 20, 2004

Jun 3, 2002

10/161883

Craig L. Stevens - Ben Lomond CA
Antoni F. Jakubiec - San Jose CA

Novellus Systems, Inc. - San Jose CA

B65G 4907

414217, 414939

A wafer processing system employing a single-wafer load lock with integrated cooling unit is disclosed. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By integrating a cooling unit within the load lock, system throughput is further increased by eliminating the need to move a newly processed wafer to a separate cooling unit before moving the wafer to the load lock.

7354335, Apr 8, 2008

Apr 9, 2004

10/821758

David T. Marquardt - Phoenix AZ, US
Joe E. Koeth - Chandler AZ, US
James Jed Crawford - Chandler AZ, US
James Ekberg - Tempe AZ, US
Antoni F. Jakubiec - San Jose CA, US
Michael D. Smigel - Phoenix AZ, US
John F. Stumpf - Phoenix AZ, US

Novellus Systems, Inc. - San Jose CA

B24B 49/00

451 11, 451285, 451331, 414783, 414936, 414941

In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.

49570188, Sep 18, 1990

Feb 26, 1990

7/484951

Antoni F. Jakubiec - San Mateo CA
Thomas M. Daley - San Jose CA

Varian Associates, Inc. - Palo Alto CA

G05G 506

74531

A mechanism for locking and unlocking a reciprocating shaft includes a plate fixed to the shaft having an inclined surface. A housing surrounds the shaft and plate having a wall surrounding the inclined surface. A set of balls is located between the inclined surface and the housing wall. An assembly is translatable relative to the shaft and is biased by a spring to jam the balls between the inclined surface and the housing wall to lock the shaft against reciprocation. The assembly is movable against the force of the spring by a fluid pressure actuated cylinder to move the balls away from the inclined surface to unlock the shaft.

49039377, Feb 27, 1990

Mar 21, 1989

7/326398

Antoni F. Jakubiec - San Mateo CA
Thomas M. Daley - San Jose CA

Varian Associates, Inc. - Palo Alto CA

F16K 31124

251 26

An isolation valve includes a housing having a port and a seal plate for sealing the port. The seal plate is linked to a shaft which carries a guide frame. To close the port, a drive mechanism drives the shaft linearly in one direction. The seal plate first moves linearly with the shaft until the guide frame stops against the housing. The seal plate then moves linearly in a direction perpendicular to a surface of the housing containing the port until it seals the port. Motion of the drive shaft in the opposite direction causes the seal plate to retrace its path. In one embodiment, the valve includes a second seal plate for sealing a second port. A spring between the guide means and the shaft provides pre-load which maintains the seal plates in a retracted position until the frame stops against the housing. An extension spring between the first and second seal plates eliminates play in the link mechanism and extends valve life.