Inventors:
Ling Ma - Los Angeles CA, US
Adam Amali - Hawthorne CA, US
Siddharth Kiyawat - El Segundo CA, US
Ashita Mirchandani - El Segundo CA, US
Donald He - Redondo Beach CA, US
Naresh Thapar - Los Angeles CA, US
Ritu Sodhi - Redondo Beach CA, US
Kyle Spring - Temecula CA, US
Daniel Kinzer - El Segundo CA, US
Assignee:
International Rectifier Corporation - El Segundo CA
International Classification:
H01L021/36
Abstract:
A process for manufacturing a semiconductor device of the trench variety with reduced feature sizes and improved characteristics which process includes forming a termination structure having a field oxide disposed in a recess below the surface of the semiconductor die in which the active elements of the device are formed, and forming source regions after the major thermal steps have been performed.