US Patent:
20140376595, Dec 25, 2014
Inventors:
- Armonk NY, US
Hung H. Tran - Hopewell Junction NY, US
Ze Zhang - Essex Junction VT, US
International Classification:
G01K 7/16
H01L 23/34
H01L 23/528
H01L 49/02
H01L 29/06
Abstract:
A first pair of resistors formed in a first layer of material, and a second pair of resistors formed in the first layer or in a second layer can be wired into a Wheatstone bridge to form a temperature sensor. Either layer can include a semiconductor or a dielectric. In a semiconductor layer, a pair of resistors can be doped areas of the layer, while in a dielectric, a pair of resistors can be material deposited in cavities in the layer, such as material from an added “middle-of-line” (MOL) metallization layer.