Inventors:
- Santa Clara CA, US
Frank Sinclair - Boston MA, US
Alexandre Likhanskii - Malden MA, US
Svetlana Radovanov - Brookline MA, US
Alexander Perel - Danvers MA, US
Graham Wright - Gloucester MA, US
Jay T. Scheuer - Rowley MA, US
Daniel Tieger - Manchester MA, US
You Chia Li - Reading MA, US
Jay Johnson - Gloucester MA, US
Tseh-Jen Hsieh - Rowley MA, US
Ronald Johnson - Gloucester MA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H01J 27/02
Abstract:
An ion source including a chamber housing defining an ion source chamber and including an extraction plate on a front side thereof, the extraction plate having an extraction aperture formed therein, and a tubular cathode disposed within the ion source chamber and having an opening formed in a front half thereof nearest the extraction aperture, wherein a rear half of the tubular cathode furthest from the extraction aperture is closed.