Yefim Bic Bichutskiy

8118939, Feb 21, 2012

Mar 17, 2006

11/378664

Boris Atlas - San Jose CA, US
Yefim Bichutskiy - Sunnyvale CA, US
Boris Bruk - San Jose CA, US

Noah Precision, LLC - Morgan Hill CA

C23C 16/00
B01D 47/00

118726, 261 19, 261DIG 65

A temperature control device for use in a process reactor system with a bubbler having a container provided with a side wall. The device includes a vessel having an internal chamber adapted to receive the container of the bubbler. An enclosure member is extendable between the container of the bubbler and the vessel for enclosing the side wall of the container within the internal chamber. A temperature-changing device is coupled to the vessel for providing heat or cold to the internal chamber.

20070178020, Aug 2, 2007

Feb 2, 2006

11/347101

Boris Atlas - San Jose CA, US
Yefim Bichutskiy - Sunnyvale CA, US
Boris Bruk - San Jose CA, US

F28F 27/00

422105000, 137087020, 165200000

An apparatus for use with a process liquid for controlling the temperature of a semiconductor-processing target comprises first and second tanks adapted for holding process liquid, at least one fluid level sensor carried by the first tank for monitoring the amount of process liquid in the first tank, and a valve coupled to one of the at least one fluid level sensor and configured to increases the flow of process liquid from the second tank to the target when the amount of process liquid in the first tank drops to a first predetermined amount. The first tank may include first and second compartments partially separated by a divider with a top whereby process liquid in the first compartment flows over the top of the divider into the second compartment.