Inventors:
Michael Nemiroff - Solana Beach CA
Hong Jun Yue - Bud Lake NJ
William Russell Schevey - Honesdale PA
Assignee:
Allied Chemical Corporation - Morris Township NJ
International Classification:
B44C 100
C03C 1500
C23F 102
Abstract:
A process is disclosed for fabricating narrow line-width yttrium iron garnet (YIG) disks suitable for microwave applications. The process comprises forming an epitaxial thin film of yttrium iron garnet, containing from about 0. 5 to 1. 5 atom percent trivalent lanthanum ions on the dodecahedral sites, on a substrate such as gadolinium gallium garnet (GGG), forming a thin layer of SiO. sub. 2 on the YIG film, forming a photoresist mask layer on the SiO. sub. 2 layer, removing portions of the photoresist mask layer to expose portions of the underlying SiO. sub. 2 layer, removing portions of the SiO. sub. 2 layer to expose portions of the underlying YIG layer and removing the exposed portions of the YIG layers to form isolated La:YIG disks supported on the GGG substrate. The substrate is then further processed, as by dicing, to provide individual La:YIG disks for fabrication into microwave devices. Linewidths of about 0.