Inventors:
Walter Anthony Wohlmuth - Portland OR, US
Assignee:
TriQuint Semiconductor, Inc. - Hillsboro OR
International Classification:
H01L 27/02
H01L 31/072
US Classification:
438576, 438167, 438172, 438570, 438572, 438573, 257155, 257191, 257192, 257E27068, 257E29041
Abstract:
A depletion mode (D-mode) field effect transistor (FET) is monolithically integrated with an enhancement mode (E-mode) FET in a multi-layer structure. The multi-layer structure includes a channel layer overlaid by a barrier layer overlaid by an ohmic contact layer. Source and drain contacts of the D-mode and E-mode FETs are coupled to the ohmic contact layer. A gate contact of the D-mode and E-mode FETs is coupled to the barrier layer. An amorphized region is provided beneath the E-mode gate contact within the barrier layer. The amorphized region forms a buried E-mode Schottky contact with the barrier layer. An alternative embodiment couples the gate contact of the D-mode transistor to a first layer that overlies the barrier layer, and provides a similar D-mode amorphized region within the first layer.