Vipulkumar M Patel

6649454, Nov 18, 2003

Nov 10, 2000

09/709927

Pradyumna Kumar Swain - Franklin Park NJ
Vipulkumar Kantilal Patel - South Brunswick NJ

Sarnoff Corporation - Princeton NJ

H01L 21339

438146, 438144, 438 60, 438 75

A process for forming a portion of a charge coupled device (CCD) is described. More particularly, wells ( ) are formed self-aligned under gate stacks ( ). By forming wells ( ) self-aligned to respective first and second gates ( ) of gate stacks ( ), potential for misalignment is reduced. First gates ( ) of gate stacks ( ) may be coupled together, and second gates ( ) of gate stacks ( ) may be coupled together, and these first and second gates ( ) may be coupled to respective signal sources ( ) to form a two-phase CCD.

6968110, Nov 22, 2005

Apr 21, 2004

10/828898

Vipulkumar Patel - Monmouth Junction NJ, US
Margaret Ghiron - Allentown PA, US
Prakash Gothoskar - Allentown PA, US
Robert Keith Montgomery - Easton PA, US
Kalpendu Shastri - Orefield PA, US
Soham Pathak - Allentown PA, US
Katherine A. Yanushefski - Zionsville PA, US

SiOptical, Inc. - Allentown PA

G02B006/10

385131, 257431

A conventional CMOS fabrication technique is used to integrate the formation of passive optical devices and active electro-optic devices with standard CMOS electrical devices on a common SOI structure. The electrical devices and optical devices share the same surface SOI layer (a relatively thin, single crystal silicon layer), with various required semiconductor layers then formed over the SOI layer. In some instances, a set of process steps may be used to simultaneously form regions in both electrical and optical devices. Advantageously, the same metallization process is used to provide electrical connections to the electrical devices and the active electro-optic devices.

6993225, Jan 31, 2006

Feb 10, 2004

10/775872

Vipulkumar Kantilal Patel - Monmouth Junction NJ, US
Prakash Gothoskar - Allentown PA, US
Robert Keith Montgomery - Easton PA, US
Margaret Ghiron - Allentown PA, US

SiOptical, Inc. - Allentown PA

G02B 6/26
H01L 21/02

385 43, 385 30, 438 31, 438 40

Methods of forming a tapered evanescent coupling region for use with a relatively thin silicon optical waveguide formed with, for example, an SOI structure. A tapered evanescent coupling region is formed in a silicon substrate that is used as a coupling substrate, the coupling substrate thereafter joined to the SOI structure. A gray-scale photolithography process is used to define a tapered region in photoresist, the tapered pattern thereafter transferred into the silicon substrate. A material exhibiting a lower refractive index than the silicon optical waveguide layer (e. g. , silicon dioxide) is then used to fill the tapered opening in the substrate. Advantageously, conventional silicon processing steps may be used to form coupling facets in the silicon substrate (i. e. , angled surfaces, V-grooves) in an appropriate relation to the tapered evanescent coupling region. The coupling facets may be formed contiguous with the tapered evanescent coupling region, or formed through the opposing side of the silicon substrate.

7118682, Oct 10, 2006

Mar 23, 2004

10/806738

Vipulkumar Kantilal Patel - Monmouth Junction NJ, US
Prakash Gothoskar - Allentown PA, US
Robert Keith Montgomery - Easton PA, US
Margaret Ghiron - Allentown PA, US

SiOptical, Inc. - Allentown PA

B29D 11/00

216 24, 216 46, 438 31, 438689

A method and structure for reducing optical signal loss in a silicon waveguide formed within a silicon-on-insulator (SOI) structure uses CMOS processing techniques to round the edges/corners of the silicon material along the extent of the waveguiding region. One exemplary set of processes utilizes an additional, sacrificial silicon layer that is subsequently etched to form silicon sidewall fillets along the optical waveguide, the fillets thus “rounding” the edges of the waveguide. Alternatively, the sacrificial silicon layer can be oxidized to consume a portion of the underlying silicon waveguide layer, also rounding the edges. Instead of using a sacrificial silicon layer, an oxidation-resistant layer may be patterned over a blanket silicon layer, the pattern defined to protect the optical waveguiding region. A thermal oxidation process is then used to convert the exposed portion of the silicon layer into silicon dioxide, forming a bird's beak structure at the edges of the silicon layer, thus defining the “rounded” edges of the silicon waveguiding structure.

7358585, Apr 15, 2008

Nov 17, 2004

10/990725

Vipulkumar Patel - Monmouth Junction NJ, US
Margaret Ghiron - Allentown PA, US
Prakash Gothoskar - Allentown PA, US
Robert Keith Montgomery - Easton PA, US
Soham Pathak - Allentown PA, US
David Piede - Allentown PA, US
Kalpendu Shastri - Orefield PA, US
Katherine A. Yanushefski - Zionsville PA, US

SiOptical, Inc. - Allentown PA

G02B 6/10
H01L 31/0224

257454, 257E29143, 385129

A silicon-based IR photodetector is formed within a silicon-on-insulator (SOI) structure by placing a metallic strip (preferably, a silicide) over a portion of an optical waveguide formed within a planar silicon surface layer (i. e. , “planar SOI layer”) of the SOI structure, the planar SOI layer comprising a thickness of less than one micron. Room temperature operation of the photodetector is accomplished as a result of the relatively low dark current associated with the SOI-based structure and the ability to use a relatively small surface area silicide strip to collect the photocurrent. The planar SOI layer may be doped, and the geometry of the silicide strip may be modified, as desired, to achieve improved results over prior art silicon-based photodetectors.

7499620, Mar 3, 2009

Sep 6, 2006

11/516217

Vipulkumar Kantilal Patel - Monmouth Junction NJ, US
Prakash Gothoskar - Allentown PA, US
Robert Keith Montgomery - Easton PA, US
Margaret Ghiron - Allentown PA, US

Lightwire, Inc. - Allentown PA

G02B 6/10

385130

A method and structure for reducing optical signal loss in a silicon waveguide formed within a silicon-on-insulator (SOI) structure uses CMOS processing techniques to round the edges/corners of the silicon material along the extent of the waveguiding region. One exemplary set of processes utilizes an additional, sacrificial silicon layer that is subsequently etched to form silicon sidewall fillets along the optical waveguide, the fillets thus “rounding” the edges of the waveguide. Alternatively, the sacrificial silicon layer can be oxidized to consume a portion of the underlying silicon waveguide layer, also rounding the edges. Instead of using a sacrificial silicon layer, an oxidation-resistant layer may be patterned over a blanket silicon layer, the pattern defined to protect the optical waveguiding region. A thermal oxidation process is then used to convert the exposed portion of the silicon layer into silicon dioxide, forming a bird's beak structure at the edges of the silicon layer, thus defining the “rounded” edges of the silicon waveguiding structure.

20050236619, Oct 27, 2005

Jun 29, 2005

11/169932

Vipulkumar Patel - Monmouth Junction NJ, US
Margaret Ghiron - Allentown PA, US
Prakash Gothoskar - Allentown PA, US
Robert Montgomery - Easton PA, US
Kalpendu Shastri - Orefield PA, US
Soham Pathak - Allentown PA, US
Katherine Yanushefski - Zionsville PA, US

H01L029/04

257057000

A conventional CMOS fabrication technique is used to integrate the formation of passive optical devices and active electro-optic devices with standard CMOS electrical devices on a common SOI structure. The electrical devices and optical devices share the same surface SOI layer (a relatively thin, single crystal silicon layer), with various required semiconductor layers then formed over the SOI layer. In some instances, a set of process steps may be used to simultaneously form regions in both electrical and optical devices. Advantageously, the same metallization process is used to provide electrical connections to the electrical devices and the active electro-optic devices.

59587938, Sep 28, 1999

Dec 24, 1997

8/998353

Vipulkumar K. Patel - South Brunswick NJ
Lawrence K. White - Princeton Jct. NJ
Lawrence A. Goodman - Plainsboro NJ

Sarnoff Corporation - Princeton NJ

H01L 213065
H01L 21314
H01L 21316
H01L 21318

438689

A method of etching an opening having tapered wall in a layer of silicon carbide (SiC) includes forming a layer of a resist on the SiC layer. An opening having tapered wall is formed in the resist layer so as to expose a portion of the SiC layer. The exposed portion of the SiC layer is then exposed to a plasma of a gas containing carbon and fluorine to etch an opening through the SiC layer with the opening having tapered walls. If a layer of a glass is provided under the SiC layer, the plasma will also etch through the glass layer to provide an opening in the glass layer having tapered walls.