Inventors:
John B. Covington - Richardson TX
Vic B. Marriott - Dallas TX
Larry G. Venable - Grand Prairie TX
Peter Kim - Carrollton TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
G03C 154
G03C 160
G03F 7022
G03F 7023
Abstract:
A water soluble contrast enhancement compound and composition, and a method of use thereof, are disclosed for improving sidewall profiles in photoresist patterning and developing. The compound consists of a 1-oxy-2-diazonaphthalene sulfonamide salt.