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Vance E Armour

from Hillsboro, OR
Age ~69

Vance Armour Phones & Addresses

  • 1578 60Th Ave, Hillsboro, OR 97124 (503) 640-9438
  • Aloha, OR
  • Wenatchee, WA
  • Hillsboro, OH
  • Riley, OR
  • Ripley, OH

Publications

Us Patents

Mechanically Stabilized Retaining Ring For Chemical Mechanical Polishing

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US Patent:
60685484, May 30, 2000
Filed:
Dec 17, 1997
Appl. No.:
8/992659
Inventors:
Marion C. Vote - Hillsboro OR
Vance E. Armour - Hillsboro OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
B24B 500
B24B 4702
US Classification:
451398
Abstract:
A carrier assembly for chemical mechanical polishing (CMP) includes a retaining ring removably attached to a rigid backing plate. The backing plate provides mechanical support over the entire load bearing surface of the retaining ring. In a further aspect of the present invention, a flexure clamp ring independent of the retaining ring for removably attaching the backing plate to the carrier assembly base Is included as part of the carrier assembly.
Vance E Armour from Hillsboro, OR, age ~69 Get Report