Inventors:
Chung-Ho Huang - San Jose CA, US
Tung Hsu - Fremont CA, US
Jackie Seto - Mountain View CA, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
G06F 17/00
US Classification:
707601, 707610, 707620, 707640, 707E17005, 7079991, 707999102, 707999104, 7079992
Abstract:
A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The system yet also includes means for obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.