Inventors:
Zhizhang Chen - Corvallis OR, US
Michael David Bic - Corvallis OR, US
Ronald L. Enck - Corvallis OR, US
Michael J. Regan - Corvallis OR, US
Thomas Novet - Corvallis OR, US
Paul J. Benning - Corvallis OR, US
Assignee:
Hewlett-Packard Development Company, L.P. - Houston TX
International Classification:
H01L029/06
H01J009/04
US Classification:
445 50, 445 49, 445 51, 438 20, 427 49, 427 77, 257 10, 257 11, 313309, 313311, 313336, 313495, 313497
Abstract:
An emitter has an electron supply layer and a silicon-based dielectric layer formed on the electron supply layer. The silicon-based dielectric layer is preferably less than about 500 Angstroms. Optionally, an insulator layer is formed on the electron supply layer and has openings defined within which the silicon-based dielectric layer is formed. A cathode layer is formed on the silicon-based dielectric layer to provide a surface for energy emissions of electrons and/or photons. Preferably, the emitter is subjected to an annealing process thereby increasing the supply of electrons tunneled from the electron supply layer to the cathode layer.