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Terry N Malsbury

from Scottsdale, AZ
Age ~67
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Also known as:
Terry Norman Malsbury, Terry W Malsbury, Terry N Malsburry, Terry Nalsbury
Related to:
Sandra Beddia Malsbury, 58Sandra L Beddia, 58Pat Beddia, 62Shirley Beddia, 93Paul Beddia
Connected to:
Steven J Malsbury, 37Angela M Malsch, 51Daniel Malsch, 53Erich L Malschafsky, 60Harry K Malsch, 68Johnna A Malsch, 39Sara A Malsch, 79Stephanie H Malsch, 58Chelsea H Malseed, 33Luanne M Malseed, 55

Terry Malsbury Phones & Addresses

  • Scottsdale, AZ
  • 2795 Vernazza Dr, Livermore, CA 94550
  • 3088 Crestablanca Dr, Pleasanton, CA 94566
  • Dublin, CA
  • Truckee, CA
  • 1475 Monterey Ct, Tracy, CA 95376
  • 25201 Lammers Rd, Tracy, CA 95377
  • Davis, CA
  • Fremont, CA

Work

Company: Lawrence livermore national laboratory Position: Engineering manager

Resumes

Resumes

Terry Malsbury Photo 1

Terry Malsbury

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Location:
Livermore, CA
Work:
Lawrence Livermore National Laboratory
Engineering Manager

Publications

Us Patents

Projection Optics Box

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US Patent:
61478180, Nov 14, 2000
Filed:
Dec 21, 1998
Appl. No.:
9/217739
Inventors:
Layton C. Hale - Livermore CA
Terry Malsbury - Tracy CA
Russell M. Hudyma - San Ramon CA
John M. Parker - Tracy CA
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
G02B 702
US Classification:
359819
Abstract:
A projection optics box or assembly for use in an optical assembly, such as in an extreme ultraviolet lithography (EUVL) system using 10-14 nm soft x-ray photons. The projection optics box utilizes a plurality of highly reflective optics or mirrors, each mounted on a precision actuator, and which reflects an optical image, such as from a mask, in the EUVL system onto a point of use, such as a target or silicon wafer, the mask, for example, receiving an optical signal from a source assembly, such as a developed from laser system, via a series of highly reflective mirrors of the EUVL system. The plurality of highly reflective optics or mirrors are mounted in a housing assembly comprised of a series of bulkheads having wall members secured together to form a unit construction of maximum rigidity. Due to the precision actuators, the mirrors must be positioned precisely and remotely in tip, tilt, and piston (three degrees of freedom), while also providing exact constraint.

Pedestal Substrate For Coated Optics

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US Patent:
62069667, Mar 27, 2001
Filed:
Sep 30, 1998
Appl. No.:
9/164414
Inventors:
Layton C. Hale - Livermore CA
Terry N. Malsbury - Tracy CA
Steven R. Patterson - Concord NC
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
B05C13/00
US Classification:
118500
Abstract:
A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.
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Terry N Malsbury from Scottsdale, AZ, age ~67 Get Report