Steven C Selbrede

6551447, Apr 22, 2003

Nov 6, 2000

09/707368

Stephen E. Savas - Alameda CA
Brad S. Mattson - Los Gatos CA
Martin L. Hammond - Cupertino CA
Steven C. Selbrede - San Jose CA

Mattson Technology, Inc. - Fremont CA

H01L 2100

15634548, 118723 I, 118723 IR

A plasma reactor and methods for processing semiconductor wafers are described. Gases are introduced into a reactor chamber. An induction coil surrounds the reactor chamber. RF power is applied to the induction coil and is inductively coupled into the reactor chamber causing a plasma to form. A split Faraday shield is interposed between the induction coil and the reactor chamber to substantially block the capacitive coupling of energy into the reactor chamber which may modulate the plasma potential. The configuration of the split Faraday shield may be selected to control the level of modulation of the plasma potential. For etch processes, a separate powered electrode may be used to accelerate ions toward a wafer surface. For isotropic etching processes, charged particles may be filtered from the gas flow, while a neutral activated species passes unimpeded to a wafer surface.

6835278, Dec 28, 2004

Jun 29, 2001

09/896283

Steven C. Selbrede - San Jose CA
Neil M. Mackie - Fremont CA
Martin L. Zucker - Orinda CA

Mattson Technology Inc. - Fremont CA

C23F 100

15634535, 15634524, 134 11, 438905

A remote plasma cleaning system includes a high conductance delivery line that delivers activated species from a remote plasma generator to a processing chamber. The delivery line preferably has a conductance of greater than 40 liters per second, enabling the power levels of the remote plasma generator to be maintained at less than about 3 kW. In one embodiment, activated species may be introduced into the processing chamber via one or more inlet ports disposed in a side portion of the processing chamber. In another embodiment, a coaxial inject/exhaust assembly enables activated species to be introduced into the processing chamber via an inner tube and gases to be exhausted from the processing chamber via an outer tube. Other embodiments incorporate an compound valve in the delivery system for selectively isolating the RPC chamber from the processing chamber and an optical baffle for protecting sensitive components of the isolation valve from exposure to ion bombardment and plasma radiation. The processing chamber may also include flow channels that enable activated species to clean cavities and components located underneath the susceptor, such as lift pin assemblies.

20040025787, Feb 12, 2004

Apr 14, 2003

10/413507

Steven Selbrede - San Jose CA, US
Martin Zucker - Orinda CA, US
Vincent Venturo - Fremont CA, US

C23C016/40

118/715000, 427/248100, 427/255310, 427/255360, 427/255340, 427/255370

A method for depositing a film onto a substrate is provided. The substrate is contained within a reactor vessel at a pressure of from about 0.1 millitorr to about 100 millitorr. The method comprises subjecting the substrate to a reaction cycle comprising i) supplying to the reactor vessel a gas precursor at a temperature of from about 20 C. to about 150 C. and a vapor pressure of from about 0.1 torr to about 100 torr, wherein the gas precursor comprises at least one organo-metallic compound; and ii) supplying to the reactor vessel a purge gas, an oxidizing gas, or combinations thereof.

20040247787, Dec 9, 2004

Mar 17, 2004

10/803528

Neil Mackie - Fremont CA, US
Martin Zucker - Orinda CA, US
Steven Selbrede - San Jose CA, US

C23C016/00
C23C016/40
C23C016/06

427/248100, 427/255310, 427/255340, 427/255370, 118/715000

At least one wafer is exposed to a treatment environment in a treatment chamber at a treatment pressure. The backside of the wafer is exposed to a heat transfer gas for thermally coupling the wafer to the support arrangement. Control of the heat transfer gas provides a fixed flow to the support arrangement enabling thermal coupling with the support arrangement. A first portion of the heat transfer gas leaks between the support arrangement and the wafer. Responsive to a backside pressure signal, a second portion of the fixed flow is released in a way which maintains the backside pressure at a selected value. In one feature, effluent flow control is used for controllably releasing the second portion of heat transfer gas. In another feature, the second portion of heat transfer gas is released into the treatment chamber. Dilution control and multi-wafer configurations are described.

20100190331, Jul 29, 2010

Sep 15, 2009

12/559928

Steven C. Selbrede - San Jose CA, US
Martin Zucker - Orinda CA, US
Vincent Venturo - Fremont CA, US

H01L 21/443
C23C 16/06
C23C 16/18
C23C 16/44
H01L 21/469

438608, 42725528, 42725532, 42725534, 42725537, 42725536, 438780, 257E21478, 257E21487

A method for depositing a film onto a substrate is provided. The substrate is contained within a reactor vessel at a pressure of from about 0.1 millitorr to about 100 millitorr. The method comprises subjecting the substrate to a reaction cycle comprising i) supplying to the reactor vessel a gas precursor at a temperature of from about 20 C. to about 150 C. and a vapor pressure of from about 0.1 torr to about 100 torr, wherein the gas precursor comprises at least one organo-metallic compound; and ii) supplying to the reactor vessel a purge gas, an oxidizing gas, or combinations thereof.

53839714, Jan 24, 1995

Mar 11, 1992

7/849488

Steven C. Selbrede - San Jose CA

Genus, Inc. - Mountain View CA

C23C 1600
C23C 1646

118728

An apparatus for preventing edge and backside coating during CVD processing supports a wafer on flexible supports within a purge cavity in a pedestal such that a movable clamp ring deforms the supports, forms a slot with the frontside of the wafer around the periphery of the wafer and by contacting the pedestal isolates the purge cavity from the coating chamber except for the slot. The wafer is heated by a pyrolytic carbon heater in the cavity and purge gas is fed to the purge cavity to flow through the slot and purge coating gas from diffusing into the purge cavity to coat the heater or the edge or backside of the wafer. In an alternative embodiment plural pedestals allow processing of plural wafers in a single cycle, and a vacuum lock and automatic handling devices are provided.

6143129, Nov 7, 2000

Jul 17, 1998

9/118281

Stephen E. Savas - Alameda CA
Brad S. Mattson - Los Gatos CA
Martin L. Hammond - Cupertino CA
Steven C. Selbrede - San Jose CA

Mattson Technology, Inc. - Fremont CA

H01L 213065

156345

A plasma reactor and methods for processing semiconductor wafers are described. Gases are introduced into a reactor chamber. An induction coil surrounds the reactor chamber. RF power is applied to the induction coil and is inductively coupled into the reactor chamber causing a plasma to form. A split Faraday shield is interposed between the induction coil and the reactor chamber to substantially block the capacitive coupling of energy into the reactor chamber which may modulate the plasma potential. The configuration of the split Faraday shield may be selected to control the level of modulation of the plasma potential. For etch processes, a separate powered electrode may be used to accelerate ions toward a wafer surface. For isotropic etching processes, charged particles may be filtered from the gas flow, while a neutral activated species passes unimpeded to a wafer surface.

54475708, Sep 5, 1995

Jun 23, 1992

7/902995

Johannes J. Schmitz - Sunnyvale CA
Frederick J. Scholz - Fremont CA
Norman L. Turner - Gloucester MA
Raymond L. Chow - Cupertino CA
Frank O. Uher - Los Altos CA
Sien G. Kang - Tracy CA
Steven C. Selbrede - San Jose CA

Genus, Inc. - Sunnyvale CA

C23C 1600

118728

Apparatus including a support and purge gas supply prevents edge and backside coating on a wafer in manufacture of integrated circuits. Various enclosure elements and methods are disclosed for containing and directing purge gas, and a CVD system is provided incorporating the elements of the invention.