Inventors:
Steven A. Mastain - Chanhassen MN
Wallace A. Peck - Eagan MN
Diana M. Simplair - Savage MN
Kurt A. Rothstein - Bloomington MN
Assignee:
Seagate Technology LLC - Scotts Valley CA
International Classification:
G11B 5127
US Classification:
2960312, 2960315, 2960318, 360119, 360122, 216 22
Abstract:
A method for forming a top magnetic pole of an inductive magnetic head being begins with the step of forming a photolithographic material over a layer of insulating material at a hill region and gap region of the inductive magnetic head formed on a wafer and over a waste region of the wafer. Second, a mask is patterned on the photolithographic material defining a paddle region over the hill region, a feeder region over the waste region, and a trench region between the feeder region and the paddle region. The trench region extends over the gap region. Third solvent is admitted into the feeder region to flow in a laminar flow through the trench region to the paddle region to form the mask and expose a surface of the layer of insulating material in the paddle and trench regions of the mask.