US Patent:
20190264320, Aug 29, 2019
Inventors:
- Velsen-Noord, NL
Colin COMMANDEUR - Beverwijk, NL
Roland Jan SNIJDERS - Wijk aan Zee, NL
Eduard Paul Mattheus BAKKER - Sint Pancras, NL
Peter William HAZELETT - Winooski VT, US
Douglas Alexander HAMILTON - Shelburne VT, US
Stephen James WIDDIS - Colchester VT, US
Timothy Dean KAISER - Colchester VT, US
Assignee:
TATA STEEL NEDERLAND TECHNOLOGY B.V. - Velsen-Noord
International Classification:
C23C 14/24
C23C 14/14
H02K 44/02
Abstract:
A method to operate an apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the feed tube runs from a container adapted to contain a liquid metal to the evaporator device and wherein an electromagnetic pump is provided in the feed tube and a valve in the feed tube between the electromagnetic pump and the evaporator device. An at least partially gas permeable electromagnetic pump, which is enclosed in a pressure controlled enclosure, is used in the method wherein electromagnetic pump and the pressure controlled enclosure are controlled such that filling and draining of the evaporator device and feed tube can be done without affecting the vacuum pressure in the vacuum chamber.