US Patent:
20080024772, Jan 31, 2008
Inventors:
Li-Ping Wang - Fremont CA, US
David S. Kuo - Palo Alto CA, US
Sophia A. Fujioka - Fremont CA, US
Jianmin Wang - Fremont CA, US
Assignee:
SEAGATE TECHNOLOGY LLC - Scotts Valley CA
International Classification:
G01N 21/00
Abstract:
An integrated unit comprising a particle detection tool and a particle removal tool combined as one merged tool comprising a disc mounting mechanism having a mount for mounting the disc for both particle detection and particle removal, wherein the particle detection tool is adapted to distinguish between a fixed defect in the disc and a particle on the disc is disclosed herein. Also, the methods of manufacturing the integrated unit and using the integrated unit for detect detection and analysis are disclosed herein.