Inventors:
Sisira Kankanam Gamage - Palo Alto CA, US
Naresh Venkata Mantravadi - San Jose CA, US
Assignee:
General Electric Company - Schenectady NY
International Classification:
H01L 21/00
G01L 9/00
US Classification:
438 53, 438 50, 438 51, 257419, 257E27006, 73715, 73721, 73727, 73754
Abstract:
A method for fabricating a sensor is disclosed that in one embodiment bonds a first device wafer to an etched second device wafer to create a suspended structure, the flexure of which is determined by an embedded sensing element that is in electrical communication with an outer surface of the sensor through an interconnect embedded in a device layer of the first device wafer. In one embodiment the suspended structure is enclosed by a cap and the sensor is configured to measure absolute pressure.