Resumes
Resumes
Shon Prisbrey Phones & Addresses
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740 Joyce St, Livermore, CA 94550 (925) 960-1513
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645 Livermore Ave, Livermore, CA 94551 (925) 960-1513
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5697 Jacquiline Way, Livermore, CA 94550 (925) 294-9752
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Saint George, UT
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1301 Orchard Park Cir, Davis, CA 95616 (530) 759-9473
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5000 Orchard Park Cir, Davis, CA 95616 (530) 759-9473
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Provo, UT
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Alameda, CA
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San Diego, CA
Work
Position:
Clerical/White Collar
Publications
Us Patents
Oxidation Preventitive Capping Layer For Deep Ultra-Violet And Soft X-Ray Multilayers
View pageUS Patent:
20040101710, May 27, 2004
Filed:
Apr 30, 2002
Appl. No.:
10/137065
Inventors:
Shon Prisbrey - Livermore CA, US
Assignee:
The Regents of the University of California
International Classification:
B32B015/00
US Classification:
428/670000, 428/635000
Abstract:
The invention uses iridium and iridium compounds as a protective capping layer on multilayers having reflectivity in the deep ultra-violet to soft x-ray regime. The iridium compounds can be formed in one of two ways: by direct deposition of the iridium compound from a prepared target or by depositing a thin layer (e.g., 5-50 angstroms) of iridium directly onto an element. The deposition energy of the incoming iridium is sufficient to activate the formation of the desired iridium compound. The compounds of most interest are iridium silicide (IrSi) and iridium molybdenide (IrMo).