US Patent:
20200388707, Dec 10, 2020
Inventors:
- Grand Cayman, KY
XIAOXIAO ZHANG - Clifton Park NY, US
SHESH MANI PANDEY - Saratoga Springs NY, US
HUI ZANG - Guilderland NY, US
International Classification:
H01L 29/78
H01L 29/51
H01L 29/10
H01L 29/49
H01L 21/28
H01L 29/66
H01L 21/311
Abstract:
The present disclosure generally relates to semiconductor device fabrication and integrated circuits. More particularly, the present disclosure relates to replacement metal gate processes and structures for multi-gate transistor devices having a short channel and a long channel component. The present disclosure provides a semiconductor device having first and second gate structures disposed in a dielectric layer above an active region, the first gate structure has a first width that is smaller than a second width of the second gate structure, a lower portion of the first gate structure having a first work-function material (WFM) layer, the first WFM layer having a top surface, a lower portion of the second gate structure having a second WFM layer, the second WFM layer having a top surface, and a first gate electrode disposed in the first WFM layer and a second gate electrode having a lower portion disposed in the second WFM layer, where the first gate electrode has a first width that is smaller than a second width of the second gate electrode.