US Patent:
20210336021, Oct 28, 2021
Inventors:
- Durtham NC, US
Brett Hull - Raleigh NC, US
Edward Robert Van Brunt - Raleigh NC, US
Shadi Sabri - Cary NC, US
Matt N. McCain - Raleigh NC, US
International Classification:
H01L 29/423
H01L 29/06
H01L 29/739
H01L 29/66
H01L 29/40
H01L 29/78
Abstract:
A semiconductor device includes a semiconductor layer structure that includes silicon carbide, a gate dielectric layer on the semiconductor layer structure, and a gate electrode on the gate dielectric layer opposite the semiconductor layer structure. In some embodiments, a periphery of a portion of the gate dielectric layer that underlies the gate electrode is thicker than a central portion of the gate dielectric layer, and a lower surface of the gate electrode has recessed outer edges such as rounded and/or beveled outer edges.