Inventors:
Zhiyun Chen - Silver Spring MD, US
Erin F. Fleet - Springfield VA, US
Serpil Gonen - College Park MD, US
Gregory D. Cooper - Arlington VA, US
Assignee:
PIXELLIGENT TECHNOLOGIES LLC - College Park MD
International Classification:
B32B 5/16
H01B 1/22
B32B 3/10
G01N 21/00
US Classification:
428206, 252503, 4281951, 356432, 977814, 977811, 977816, 977818, 977819, 977823, 977824, 977773
Abstract:
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.