Inventors:
Ronald S. Charsky - Binghamton NY
Alexander L. Flamholz - Monsey NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
G02B 900
Abstract:
A system for measuring the lateral displacement between edges located on two spaced apart objects, with a precision in the order of 1 microinch, generates and analyses the diffraction pattern produced by the physical edge on one object and the aerial image of the edge on the other object. The system can be used for the alignment of the objects or the comparison of patterns located on the objects.