Inventors:
Deyan Wang - Hudson MA, US
Robert D. Mikkola - Grafton MA, US
Chunyi Wu - Shrewsbury MA, US
George G. Barclay - Jefferson MA, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
International Classification:
C25D 3/58
C25D 3/38
C23C 18/40
US Classification:
205296, 205239, 205291, 205297, 106 126
Abstract:
Plating baths containing a mixture of leveling agents, where the mixture includes a first level agent having a first diffusion coefficient and a second leveling agent having a second diffusion coefficient, are provided. Such plating baths deposit a metal layer, particularly a copper layer, that is substantially planar across a range of electrolyte concentrations. Methods of depositing metal layers using such plating baths are also disclosed. These baths and methods are useful for providing a planar layer of copper on a substrate having small apertures, such as an electronic device.