Resumes
Resumes
Robert Machugh Phones & Addresses
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24 Algernon St, Cornwall, NY 12518
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Yorktown Heights, NY
Publications
Us Patents
Host Control For A Variety Of Tools In Semiconductor Fabs
View pageUS Patent:
20060025880, Feb 2, 2006
Filed:
Jul 29, 2004
Appl. No.:
10/710709
Inventors:
Padmavathi Chukka - Poughkeepsie NY, US
Ying Du - Sterling VA, US
Barry Herbold - Beacon NY, US
Benjamin Herta - Poughquag NY, US
Frank Liang - Poughkeepsie NY, US
Robert MacHugh - Newburgh NY, US
Sorabh Murgai - Wappingers Falls NY, US
Thomas O'Leary - Hyde Park NY, US
Chinmay Oza - Danbury CT, US
Rakesh Parimi - Beacon NY, US
Martin Soyka - Wappingers Falls NY, US
Ying Du - Sterling VA, US
Barry Herbold - Beacon NY, US
Benjamin Herta - Poughquag NY, US
Frank Liang - Poughkeepsie NY, US
Robert MacHugh - Newburgh NY, US
Sorabh Murgai - Wappingers Falls NY, US
Thomas O'Leary - Hyde Park NY, US
Chinmay Oza - Danbury CT, US
Rakesh Parimi - Beacon NY, US
Martin Soyka - Wappingers Falls NY, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
G06F 19/00
US Classification:
700121000, 700096000
Abstract:
A software module for use within an integrated circuit fabrication facility sends commands to a tool according to a method that operates with any tool that satisfies SEMI standards to add or subtract steps in a process without reprogramming or recompiling. The program operates autonomously to change parameters of commands that it sends to the tool to improve performance of the fab.
Method For Creating Wafer Batches In An Automated Batch Process Tool
View pageUS Patent:
20090099681, Apr 16, 2009
Filed:
Oct 16, 2007
Appl. No.:
11/873092
Inventors:
Russell Herbert Arndt - Fishkill NY, US
Michael Robert Biagetti - Fishkill NY, US
Robert J. MacHugh - Newburgh NY, US
Charles Jesse Taft - Wappingers Falls NY, US
Michael Robert Biagetti - Fishkill NY, US
Robert J. MacHugh - Newburgh NY, US
Charles Jesse Taft - Wappingers Falls NY, US
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION - Armonk NY
International Classification:
H01L 21/00
G06F 19/00
G06F 19/00
US Classification:
700121, 41422202, 438800
Abstract:
A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.