Inventors:
Stephen J. Fonash - State College PA
Ali Kaan Kalkan - State College PA
Robert H. Detig - New Providence NJ
Assignee:
The Penn State Research Foundation - University Park PA
International Classification:
G03G 1316
Abstract:
A metal-containing toner is electrostatically printed on a semiconductor surface. Subsequently, this surface is annealed to achieve certain material modifications selectively at the regions where the toner is applied. If the toner contains a crystallization-catalyst metal, such as, Pd, Ni, Pt, and Cr, and is printed on an amorphous semiconductor film, annealing results in conversion of the printed regions to polycrystalline. If the metal-containing toner is printed on a silicon surface (i. e. , amorphous/poly-Si layer or Si wafer) the printed regions are selectively converted to a metal-silicide (with the sufficient amount of metal applied on these regions) upon annealing.