Thomas R. Anthony - Schenectady NY Richard J. Connery - Liverpool NY David F. Hoeschele - Boyertown PA
Assignee:
General Electric Company - Schenectady NY
International Classification:
H01L 2906 H01L 2348
US Classification:
357 68
Abstract:
Electrically conductive paths are provided for the high-speed low-loss transfer of electrical signals between integrated circuits of a single silicon-on-sapphire body or between integrated circuits of several silicon-on-sapphire bodies. The conductive paths through the silicon-on-sapphire bodies are made by a process involving implantation of a conductive material in laser-drilled holes.
