Inventors:
Ralph C. Longsworth - Allentown PA, US
Assignee:
SHI-APD Cryogenics, Inc. - Allentown PA
International Classification:
F25B 9/00
B01D 8/00
Abstract:
An integrated cryopump and 2 stage pulse tube refrigeration system () comprising a cryopump, a compressor for a pulse tube refrigerator, a pulse tube refrigerator located within the vacuum chamber of the cryopump where the hot ends of the pulse tubes () are connected to each other through a buffer volume (), are integral to the cryopump vacuum chamber hosing, and a buffer volume () is connected to the hot ends () of the pulse tubes () through flow restrictors ().