Inventors:
Tom Ni - Pleasanton CA, US
Jinyuan Chen - Union City CA, US
Qing Qian - San Jose CA, US
Yuehong Fu - Fremont CA, US
Zhaoyang Xu - Shanghai, CN
Xusheng Zhou - Shanghai, CN
Ye Wang - Shanghai, CN
Assignee:
Advanced Micro-Fabrication Equipment, Inc. Asia - George Town, Grand Cayman
International Classification:
C23C 16/00
US Classification:
118715, 118723 E, 15634529, 15634547, 31511171
Abstract:
A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.