Inventors:
Damion T. Searls - Portland OR
Prateek J. Dujari - Portland OR
Bin Lian - Hillsboro OR
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 310312
US Classification:
257 77, 257712, 257713, 257706, 257707, 257708, 257924
Abstract:
A semiconductor substrate with integrated circuit devices on its front side and a high thermal conductivity layer such as diamond on its back side, with components such as capacitors embedded in the high thermal conductivity layer and coupled to the front side integrated circuits with vias through the substrate.