John T. Harvell - Subduby MA Philip A. Lessard - Boxborough MA
Assignee:
Helix Technology Corporation - Waltham MA
International Classification:
B01D 800
US Classification:
62 555
Abstract:
In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock to the work chamber 12 for absorption by the cryopump of the work chamber. Alternatively, the flow line is connected between the load lock cryopump and the cryopump of the work chamber for directly passing the noncondensible gases to the work chamber cryopump. The flow line prevents buildup of noncondensible gases within the cryopump of the load lock. The flow line may include baffles to damp pressure surges during cryopumping of the load lock. A control valve connected to the flow line allows operator control of the passing of noncondensible gases from the load lock cryopump to the work chamber or to the work chamber cryopump through the flow line. The dimensions of the flow line provide molecular flow of the noncondensible gases.
High Pressure Stepped Clearance Seal Valve In A Cryogenic Refrigeration System
Philip A. Lessard - Acton MA Marshall J. Smith - Danvers MA
Assignee:
Helix Technology Corporation - Waltham MA
International Classification:
F25B 900 F16K 3112
US Classification:
137509
Abstract:
In an expansion engine used in cryogenic refrigeration, a stepped inlet valve 10 and a stepped exhaust valve 11 are fluid activated to control high pressure gas such as helium into and out of the engine. Clearance seals in the stepped valve are achieved by sizing a small diameter of a stepped piston to a small bore and by sizing a sleeve 16 to a larger diameter of the stepped piston. The sleeve 16 fits loosely within a large bore, and is fixed into position by placing a wire of soft metal 9 between the sleeve and the wall of the cylinder.
Inserter/Extractor Used With Carousel Of Storage Bins
Richard A. Anderson - Greene ME Philip D. Lessard - Greene ME
Assignee:
Diamond Machine Co. - Lewiston ME
International Classification:
B65G 106
US Classification:
414280
Abstract:
An inserter/extractor apparatus for inserting and extracting objects from bins located at different heights in a carousel including a vertical frame and an inserter/extractor carriage that is vertically movable along the frame and has a pair of gripping pads that have opposed, high friction gripping surfaces. The gripping pads are movable along a first horizontal axis from a retracted position in which said gripping pads and carriage are free to move vertically along the frame without interference with the bins to an extended position in which the gripping pads are even with a bin. The gripping pads are movable with respect to each other along a second horizontal axis that is transverse to the first horizontal axis from open positions spaced from each other by a distance larger than the largest dimension of an object to positions spaced from each other by a distance less than the smallest dimension for an object. The gripping pads apply a predetermined force to an object between them when stopped from further movement along the second horizontal axis by the object between them.
Inserter/Extractor Used With Carousel Of Storage Bins
Richard A. Anderson - Greene ME Philip D. Lessard - Greene ME
Assignee:
Diamond Machine Company - Lewiston ME
International Classification:
B65G 100
US Classification:
414268
Abstract:
An inserter/extractor apparatus for inserting and extracting objects from bins located at different heights in a carousel including a vertical frame and an inserter/extractor carriage that is vertically movable along the frame and has a pair of gripping pads that have opposed, high friction gripping surfaces. The gripping pads are movable along a first horizontal axis from a retracted position in which said gripping pads and carriage are free to move vertically along the frame without interference with the bins to an extended position in which the gripping pads are even with a bin. The gripping pads are movable with respect to each other along a second horizontal axis that is transverse to the first horizontal axis from open positions spaced from each other by a distance larger than the largest dimension of an object to positions spaced from each other by a distance less than the smallest dimension for an object. The gripping pads apply a predetermined force to an object between them when stopped from further movement along the second horizontal axis by the object between them.
Philip A. Lessard - Boxboro MA Thomas Dunn - Avon MA
Assignee:
Helix Technology Corporation - Waltham MA
International Classification:
B01D 800
US Classification:
62 555
Abstract:
A cryopump having at least two temperature stages for pumping gases at their optimal temperatures. A first embodiment has a third temperature stage that is surrounded by and separated from the second temperature stage which is surrounded by and separated from the first temperature stage. Adsorbent placed on the second and third stages are operated at different temperatures to prevent gases with higher critical mobility temperatures from becoming immobilized at the entrance of pores and wells along the surface of the adsorbent. Another embodiment has at least a second stage, a temperature sensor, and a heater to maintain the second stage temperature at optimal level for the gas being pumped.
A cryopump 20 with increased adsorptive capacity comprising a honeycomb adsorption structure 46 positioned within a second stage chevron assembly 40. Multiple chambers 58 of the honeycomb are covered with adsorbent charcoal 68. The entire structure 46 is attached to a second stage 52 of a cryogenic refrigerator 45.
Pressure Controlled Cryopump Regeneration Method And System
Bruce R. Andeen - Boxborough MA Gerald J. Fortier - Plainville MA Allen J. Bartlett - Milford MA Michael J. Eacobacci - Randolph MA Philip C. Lessard - Boxborough MA
Assignee:
Helix Technology Corporation - Mansfield MA
International Classification:
B01D 800
US Classification:
62 555
Abstract:
In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.
Fred F. Chellis - late of Concord MA Philip A. Lessard - Acton MA
Assignee:
Helix Technology Corporation - Waltham MA
International Classification:
F25B 900
US Classification:
62 6
Abstract:
Valves for controlling process gas at the cold end of an expansion engine are fluid actuated. The actuating fluid is controlled by a solenoid actuated spool valve positioned at ambient temperature. The fluid is cooled in a thermally regenerative flow path extending between the solenoid actuated valve and the fluid actuated valve.