Inventors:
Niels Christopher Engdahl - San Jose CA, US
Assignee:
Crystallume Corporation - Lincoln CA
International Classification:
H01L 21/00
US Classification:
438105, 4288332, 428835, 4272497, 4272498, 257 77, 257E23111, 257E21041, 257E21049, 257E21095, 257E21096, 257E21105, 257E21107, 257E21182, 257E2127
Abstract:
The invention is a method for growing a critical adherent diamond layer on a substrate by Chemical Vapor Deposition (CVD) and the article produced by the method. The substrate can be a compound semiconductor coated with an adhesion layer. The adhesion layer is preferably a dielectric, such as silicon nitride, silicon carbide, aluminum nitride or amorphous silicon, to name some primary examples. The typical thickness of the adhesion layer is one micrometer or less. The resulting stack of layers, (e. g. substrate layer, adhesion layer and diamond layer) is structurally free of plastic deformation and the diamond layer is well adherent to the dielectric adhesion layer such that it can be processed further, such as by increasing the thickness of the diamond layer to a desired level, or by subjecting it to additional thin film fabrication process steps. In addition to preventing plastic deformation of the layer stack, the process also reduces the formation of soot during the CVD process. The reduction of soot allows for better adhesion between the adhesion layer and diamond layer of the layer stack.