Inventors:
Vijay Sakhare - Santa Clara CA, US
Sekar Krishnasamy - Santa Clara CA, US
Mordechai Leska - Santa Clara CA, US
Donald Foldenauer - San Jose CA, US
Rinat Shimshi - San Jose CA, US
Marvin L. Freeman - Round Rock TX, US
Jeffery Hudgens - San Francisco CA, US
International Classification:
G05B 19/04
H01L 21/67
G12B 13/00
Abstract:
Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.