Inventors:
- Santa Clara CA, US
Robert Irwin Decottignies - Redwood City CA, US
Andrew Nguyen - San Jose CA, US
Paul B. Reuter - Austin TX, US
Angela R. Sico - Round Rock TX, US
Michael Kuchar - Georgetown TX, US
Travis Morey - Austin TX, US
Mitchell DiSanto - Georgetown TX, US
International Classification:
H01L 21/67
C23C 16/455
Abstract:
An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.