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Michel H Pharand

from Los Gatos, CA
Age ~62
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Also known as:
Michel P Pharand, Harand T Michel, Michel I
Phone and address:
14161 Old Japanese Rd, Los Gatos, CA 95033
(978) 609-4952
Related to:
Toshia Tanee Nusbaum, 56
Connected to:
Anthony L Pharao, 54Ezzat A Pharaon, 51Lisa R Pharazis, 64Judith L Phare, 67Stephen G Phare, 79Nerlande Phareau, 60Andrea C Phares, 38Benjamin Phares, 49Cindy J Phares, 67David R Phares, 59

Michel Pharand Phones & Addresses

  • 14161 Old Japanese Rd, Los Gatos, CA 95033 (978) 609-4952
  • San Jose, CA
  • 17 Belmont Dr, Chelmsford, MA 01824 (978) 250-1031
  • 20 Westgate Dr, Woburn, MA 01801 (781) 933-9967
  • 6 Kimball Rd, Woburn, MA 01801 (781) 933-9967
  • Santa Cruz, CA

Work

Company: Kla-tencor Dec 2018 Position: Mechanical engineering manager

Education

School / High School: Tufts University 2001 to 2003 Specialities: Management, Engineering

Skills

Finite Element Analysis • Mechanical Engineering • R&D • Semiconductors • Robotics • Engineering Management • Product Development • Design For Manufacturing • Engineering • Solidworks • Modal Analysis • Electronics • Project Management • Structural Analysis • Spc • Pro Engineer • Testing • Six Sigma • Matlab • Thin Films

Languages

French • English

Interests

Swimming • Cross Country Skiing • Running • Cycling

Industries

Semiconductors

Resumes

Resumes

Michel Pharand Photo 1

Mechanical Engineering Manager

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Location:
Los Gatos, CA
Industry:
Semiconductors
Work:
Kla-Tencor
Mechanical Engineering Manager
Ultratech
Principal Mechanical Engineer at Ultratech, Inc
Nikon Research Corporation of America
Principal Mechanical Engineer
Asyst Technologies Sep 2006 - Jan 2009
Principal Mechanical Engineer and Director
Pharand Consulting 2008 - 2009
Owner
Education:
Tufts University 2001 - 2003
University of Massachusetts Lowell 1999 - 2001
Masters, Master of Science In Mechanical Engineering Concordia University 1992 - 1993
Masters, Master of Science In Mechanical Engineering Concordia University 1988 - 1992
Bachelor of Science In Mechanical Engineering, Bachelors, Design Dawson College 1984 - 1988
Skills:
Finite Element Analysis
Mechanical Engineering
R&D
Semiconductors
Robotics
Engineering Management
Product Development
Design For Manufacturing
Engineering
Solidworks
Modal Analysis
Electronics
Project Management
Structural Analysis
Spc
Pro Engineer
Testing
Six Sigma
Matlab
Thin Films
Interests:
Swimming
Cross Country Skiing
Running
Cycling
Languages:
French
English

Publications

Isbn (Books And Publications)

Shaw

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Author

Michel W. Pharand

ISBN #

0271027363

Shaw

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Author

Michel W. Pharand

ISBN #

0271027673

Shaw

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Author

Michel W. Pharand

ISBN #

0271029684

The Letters of Bernard Shaw to the Times 1898-1950

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Author

Michel W. Pharand

ISBN #

0716529181

Bernard Shaw and the French

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Author

Michel W. Pharand

ISBN #

0813018285

Us Patents

Wafer Pedestal Tilt Mechanism

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US Patent:
6727509, Apr 27, 2004
Filed:
Dec 17, 2001
Appl. No.:
10/023516
Inventors:
Michel Pharand - Chelmsford MA, 01824
Allan D. Weed - Marblehead MA, 01945
International Classification:
A61N 500
US Classification:
2504922, 25045411
Abstract:
The invention provides a wafer pad assembly and actuation system for use in an ion implanter, preferably a batch-type ion implanter. The wafer pad assembly includes a rotatable wafer support pad having an upper surface for mounting the wafer, and a lower surface rotationally mounted to a housing of the wafer pad assembly. The lower surface of the wafer support pad further comprises a flange connected to a rotatable shaft. The shaft is connected to an actuator for selectively indexing the shaft so that the wafer support pad is rotationally indexed about its geometric center. The lower surface of the wafer support pad is also connected to a frame having an outer curved surface rotatably mounted within a mating bearing surface of a housing. The curved frame is connected to a plurality of linkages for moving the wafer support pad within the curved frame so that the wafer is pivotable or tiltable about its geometric center.

Apparatus For Positioning An Elevator Tube

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US Patent:
7026581, Apr 11, 2006
Filed:
Aug 22, 2003
Appl. No.:
10/646228
Inventors:
Michel Pharand - Chelmsford MA, US
Thomas L. Durant - Reading MA, US
Ari Eiriksson - Brighton MA, US
Richard Gueler - Hamilton MA, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
F27B 5/14
F27D 11/00
US Classification:
219392, 219390, 118724, 118725, 392416, 392418
Abstract:
A wafer support position control mechanism selectively positions a semiconductor wafer along an axis of excursion within a process chamber. An elevator tube protrudes through an orifice in the chamber surface and is connected at a first distal end to the wafer support. A compliant, dynamic seal within the orifice engages the elevator tube to form a gas curtain within a gap between the seal and the elevator tube to seal the process chamber. A moveable carriage is connected to the elevator tube at a second distal end for moving the wafer support along the axis of excursion. Rigid mechanical structure couples the second distal end of the elevator tube to the moveable carriage.

Uniform Gas Cushion Wafer Support

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US Patent:
7070661, Jul 4, 2006
Filed:
Aug 22, 2003
Appl. No.:
10/646249
Inventors:
Ari Eiriksson - Brighton MA, US
Richard Gueler - Hamilton MA, US
Michel Pharand - Chelmsford MA, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
H01L 21/00
C23C 16/00
US Classification:
118725, 118728, 118724, 15634551, 15634552, 2194441, 219544, 2041921, 20429801
Abstract:
A workpiece is supported on a gas cushion to reduce mechanical stresses on the workpiece during processing. A plenum having a workpiece support flange for receiving the workpiece is connected to a gas supply. When gas flows into the plenum and pressure increases sufficiently to lift the workpiece, the workpiece is lifted and the gas flows out of the plenum between the flange and the workpiece edge. The workpiece is thus supported above the flange by the gas during processing.

Magnetic Support Structure For An Elevator Tube Of A Vertical Rapid Thermal Processing Unit

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US Patent:
7100759, Sep 5, 2006
Filed:
Aug 9, 2004
Appl. No.:
10/914343
Inventors:
Michel Pharand - Chelmsford MA, US
Dennis Normandin - Chelmsford MA, US
Ari Eiriksson - Reykjavik, IS
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
B65G 35/00
US Classification:
198619, 414 3
Abstract:
A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator structure includes a workpiece support for supporting the workpiece and an elevator shaft coupled to the workpiece support and extending externally from the processing chamber. An end portion of the elevator shaft, external to the processing chamber, has a selected magnetic polarity. The elevator structure also includes moveable carriage coupled to the shaft to provide vertical movement of the workpiece within the processing chamber. The carriage includes a shaft support having the selected polarity. The shaft support is positioned adjacent the polarized end portion of the elevator shaft such that repulsive magnetic forces maintain a gap between the end portion of the elevator shaft and the shaft support as the shaft support and elevator shaft move vertically along a path of travel.

High-Performance Electrostatic Clamp Comprising A Resistive Layer, Micro-Grooves, And Dielectric Layer

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US Patent:
7151658, Dec 19, 2006
Filed:
Apr 22, 2003
Appl. No.:
10/420329
Inventors:
Peter L. Kellerman - Essex MA, US
Victor Benveniste - Gloucester MA, US
Michel Pharand - Chelmsford MA, US
Dale K. Stone - Lynnfield MA, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
H02N 13/00
US Classification:
361234
Abstract:
An electrostatic clamp for securing a semiconductor wafer during processing. The electrostatic clamp includes a base member, a first dielectric layer, a second dielectric layer having a gas pressure distribution micro-groove network formed therein, a gas gap positioned between a backside of a semiconductor wafer and the second dielectric layer, and a pair of high voltage electrodes positioned between the first dielectric layer and the second dielectric layer.

Workpiece Handling Scan Arm For Ion Implantation System

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US Patent:
7560705, Jul 14, 2009
Filed:
Aug 17, 2007
Appl. No.:
11/840888
Inventors:
Ari Eiriksson - Beverly MA, US
Donovan Beckel - Wakefield MA, US
Robert Mitchell - Winchester MA, US
Michel Pharand - San Jose CA, US
Marvin LaFontaine - Kingston NH, US
Ashwin Purohit - Gloucester MA, US
Steven Weed - Marblehead MA, US
Wayne Arseneault - Lynnfield MA, US
Shantanu Pathak - Nutley NJ, US
Joseph Daniel Foley - Swampscott MA, US
Assignee:
Axcelis Technologies, Inc. - Beverly MA
International Classification:
H01J 37/317
US Classification:
25044211, 25049221
Abstract:
An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

Combination Load Lock For Handling Workpieces

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US Patent:
7828504, Nov 9, 2010
Filed:
May 12, 2006
Appl. No.:
11/432923
Inventors:
Michel Pharand - Chelmsford MA, US
Klaus Becker - Kensington NH, US
Klaus Petry - Merrimac MA, US
Marvin R. LaFontaine - Kingston NH, US
Michael R. Mitrano - Wilmington MA, US
Assignee:
Axcellis Technologies, Inc. - Beverly MA
International Classification:
H01L 21/677
US Classification:
414217
Abstract:
A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.

Direct Drive Modular Belt Conveyor, Cartridge, And Quick Connect-Disconnect Constant Velocity Drive Shaft, For High Speed Foup Transport

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US Patent:
8376130, Feb 19, 2013
Filed:
Apr 8, 2009
Appl. No.:
12/420529
Inventors:
Roumen Deyanov - Fremont CA, US
Michel Pharand - Los Gatos CA, US
Michael Krolak - Los Gatos CA, US
Theodore W. Rogers - Alameda CA, US
Assignee:
Muratec Automation Co., Ltd. - Kyoto
International Classification:
B65G 15/60
US Classification:
198842, 198817, 198846
Abstract:
A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e. g. , FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor.
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Michel H Pharand from Los Gatos, CA, age ~62 Get Report