Martin M Liphardt

6590655, Jul 8, 2003

Apr 23, 2001

09/840483

James D. Welch - Omaha NE
Blaine D. Johs - Lincoln NE
Martin M. Liphardt - Lincoln NE
Ping He - Lincoln NE

J.A. Woollam Co. Inc. - Lincoln NE

G01J 400

356369, 356 73, 356326, 356445

Disclosed are systems for, and methods of controlling radial energy density profiles in, and/or cross-section dimensioning of electromagnetic beams in polarimeters, ellipsometers, reflectometers and spectrophotometers.

6804004, Oct 12, 2004

May 30, 2000

09/583229

Blaine D. Johs - Lincoln NE
Craig M. Herzinger - Lincoln NE
Ping He - Lincoln NE
Martin M. Liphardt - Lincoln NE

J. A. Woollam Co., Inc - Lincoln NE

G01B 1106

356369

Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.

6859278, Feb 22, 2005

Jan 15, 2002

10/050802

Blaine D. Johs - Lincoln NE, US
Ping He - Lincoln NE, US
Martin M. Liphardt - Lincoln NE, US
Christopher A. Goeden - Lincoln NE, US
John A. Woollam - Lincoln NE, US
James D. Welch - Omaha ME, US

J.A. Woollam Co. Inc. - Lincoln NE

G01N021/21

356369

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.

6930813, Aug 16, 2005

Apr 29, 2003

10/425801

Martin M. Liphardt - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Ping He - Lincoln NE, US
James D. Welch - Omaha NE, US

J.A. Woollam Co. Inc. - Lincoln NE

G02F001/00
G02F001/33
G01J004/00
G01J003/28
G01J003/50

359237, 359308, 359641, 356369, 356327, 356 73, 356445, 250226, 25022715, 250372, 73657, 600476

Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

6950182, Sep 27, 2005

Jun 24, 2002

10/178723

Martin M Liphardt - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Ping He - Lincoln NE, US

J. A. Woollam Co. - Lincoln NE

G01N021/00
G01J004/00

3562371, 356369

Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

6982792, Jan 3, 2006

Feb 28, 2003

10/376677

John A. Woollam - Lincoln NE, US
Steven E. Green - Lincoln NE, US
Ping He - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Galen L. Pfeiffer - Lincoln NE, US
Brian D. Guenther - Lincoln NE, US
Martin M. Liphardt - Lincoln NE, US

J.A. Woollam Co. INC - Lincoln NE

G01J 4/00

356369

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

7057717, Jun 6, 2006

Apr 30, 2003

10/426590

Martin M. Liphardt - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Ping He - Lincoln NE, US
Christopher A. Goeden - Lincoln NE, US
John A. Woollam - Lincoln NE, US
James D. Welch - Omaha NE, US

J.A. Woollam Co., INC - Lincoln NE

G01N 21/00

3562372

Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.

7075650, Jul 11, 2006

Jul 7, 2003

10/613118

Blaine D. Johs - Lincoln NE, US
Martin M. Liphardt - Lincoln NE, US
Ping He - Lincoln NE, US
Jeffrey S. Hale - Lincoln NE, US

J.A. Woollam Co. Inc. - Lincoln NE

G01J 4/00

356369

A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.