Mark C Carbone

6217367, Apr 17, 2001

Jul 14, 1999

9/353123

Frank Otto Uher - Los Altos CA
John William Andberg - Santa Cruz CA
Mark Charles Carbone - Mountain View CA
Donald Richmon - Palo Alto CA

Aehr Test Systems - Mountain View CA

H01R 1362

439372

A kinematic coupling includes a male connector (94) and first and second opposed jaws (122, 124. ) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force when the kinematic coupling is engaged.

6340895, Jan 22, 2002

Jul 14, 1999

09/353214

Frank Otto Uher - Los Altos CA
John William Andberg - Santa Cruz CA
Mark Charles Carbone - Mountain View CA

AEHR Test Systems, Inc. - Fremont CA

G01R 3102

324755, 324760

A cartridge ( ) includes a chuck plate ( ) for receiving a wafer ( ) and a probe plate ( ) for establishing electrical contact with the wafer. In use, a mechanical connecting device ( ) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card ( ) that is movably mounted to the probe plate by means of a plurality of leaf springs (. ) The mechanical connecting device is preferably a kinematic coupling including a male connector ( ) and first and second opposed jaws (. ) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged.

6556032, Apr 29, 2003

Jun 18, 2001

09/884537

Frank Otto Uher - Los Altos CA
John William Andberg - Santa Cruz CA
Mark Charles Carbone - Mountain View CA

Aehr Test Systems - Fremont CA

G01R 3100

324755, 324760, 3241581

A cartridge ( ) includes a chuck plate ( ) for receiving a wafer ( ) and a probe plate ( ) for establishing electrical contact with the wafer. In use, a mechanical connecting device ( ) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card ( ) that is movably mounted to the probe plate by means of a plurality of leaf springs ( ) The mechanical connecting device is preferably a kinematic coupling including a male connector ( ) and first and second opposed jaws ( ) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged.

6580283, Jun 17, 2003

Jul 14, 1999

09/353116

Mark Charles Carbone - Mountain View CA
Frank Otto Uher - Los Altos CA
John William Andberg - Santa Cruz CA
Jerzy Lobacz - San Mateo CA

Aehr Test Systems - Fremont CA

G01R 3102

324760, 324754, 324765

A cartridge ( ) includes a chuck plate ( ) for receiving a wafer ( ) and a probe plate ( ) for establishing electrical contact with the wafer. In use, a mechanical connecting device ( ) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card ( ) that is movably mounted to the probe plate by means of a plurality of leaf springs ( ). The mechanical connecting device is preferably a kinematic coupling including a male connector ( ) and first and second opposed jaws ( ). The cartridge can then be removed from the alignment device and placed in a burn-in or test chamber that does not itself require means for aligning the wafer or for providing a probing force.

7088117, Aug 8, 2006

Mar 24, 2003

10/396170

Frank Otto Uher - Los Altos CA, US
John William Andberg - Santa Cruz CA, US
Mark Charles Carbone - Mountain View CA, US

Aehr Test System - Fremont CA

G01R 31/02
G01R 31/26

324754, 324765

A cartridge () includes a chuck plate () for receiving a wafer () and a probe plate () for establishing electrical contact with the wafer. In use, a mechanical connecting device () locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card () that is movably mounted to the probe plate by means of a plurality of leaf springs (. ) The mechanical connecting device is preferably a kinematic coupling including a male connector () and first and second opposed jaws (. ) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged.

7541822, Jun 2, 2009

Feb 23, 2006

11/276314

Frank Otto Uher - Los Altos CA, US
John William Andberg - Santa Cruz CA, US
Mark Charles Carbone - Mountain View CA, US

Aehr Test Systems - Fremont CA

G01R 31/02
G01R 31/28

324755, 324760, 3241581

A cartridge () includes a chuck plate () for receiving a wafer () and a probe plate () for establishing electrical contact with the wafer. In use, a mechanical connecting device () locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card () that is movably mounted to the probe plate by means of a plurality of leaf springs (. ) The mechanical connecting device is preferably a kinematic coupling including a male connector () and first and second opposed jaws (. ) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged.

8118618, Feb 21, 2012

May 3, 2010

12/772932

Kenneth W. Deboe - Santa Clara CA, US
Frank O. Uher - Los Altos CA, US
Jovan Jovanovic - Santa Clara CA, US
Scott E. Lindsey - Brentwood CA, US
Thomas T. Maenner - San Ramon CA, US
Patrick M. Shepherd - San Jose CA, US
Jeffrey L. Tyson - Mountain View CA, US
Mark C. Carbone - Cupertino CA, US
Paul W. Burke - Hayward CA, US
Doan D. Cao - San Jose CA, US
James F. Tomic - Oakland CA, US
Long V. Vu - San Jose CA, US

Aehr Test Systems - Fremont CA

H01R 24/00

439676

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

8388357, Mar 5, 2013

Jan 18, 2012

13/353269

Kenneth W. Deboe - Santa Clara CA, US
Frank O. Uher - Los Altos CA, US
Jovan Jovanovic - Santa Clara CA, US
Scott E. Lindsey - Brentwood CA, US
Thomas T. Maenner - San Ramon CA, US
Patrick M. Shepherd - San Jose CA, US
Jeffrey L. Tyson - Mountain View CA, US
Mark C. Carbone - Cupertino CA, US
Paul W. Burke - Hayward CA, US
Doan D. Cao - San Jose CA, US
James F. Tomic - Oakland CA, US
Long V. Vu - San Jose CA, US

Aehr Test Systems - Fremont CA

H01R 12/00

439 70

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.