US Patent:
20210025935, Jan 28, 2021
Inventors:
- Fremont CA, US
Kenneth W. Deboe - Santa Clara CA, US
Frank O. Uher - Los Altos CA, US
Jovan Jovanovic - Santa Clara CA, US
Scott E. Lindsey - Brentwood CA, US
Thomas T. Maenner - San Ramon CA, US
Patrick M. Shepherd - San Jose CA, US
Jeffrey L. Tyson - Mountain View CA, US
Mark C. Carbone - Cupertino CA, US
Paul W. Burke - Hayward CA, US
Doan D. Cao - San Jose CA, US
James F. Tomic - Oakland CA, US
Long V. Vu - San Jose CA, US
Assignee:
Aehr Test Systems - Fremont CA
International Classification:
G01R 31/28
G01R 31/26
G01R 31/00
G06F 8/30
Abstract:
An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.