Inventors:
Ajay P. Giri - Poughkeepsie NY
John U. Knickerbocker - Hopewell Junction NY
David C. Long - Wappingers Falls NY
Subhash L. Shinde - Cortlandt Manor NY
Lisa M. Studzinski - Collierville TN
Rao V. Vallabhaneni - Hopewell Junction NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 2144
H01L 2148
H01L 2150
Abstract:
A process for fabricating a microelectronic structure. The process comprises processing a metal carrier having a top surface and a bottom surface, wherein the top surface and the bottom surface are processed to promote adhesion, forming a dielectric layer around the metal carrier, wherein the dielectric layer substantially covers the top surface and the bottom surface of the metal carrier, and applying a first patterned layer of conductive material to the microelectronic structure. In one preferred embodiment, the process further comprises comprising sintering the metal carrier, the dielectric layer, and the first patterned layer of conductive material. In one preferred embodiment, the process further comprises forming a via hole through the metal carrier before the forming of the dielectric layer around the metal carrier, wherein the forming of the dielectric layer comprises forming the dielectric layer inside the via hole.