US Patent:
20050132816, Jun 23, 2005
Inventors:
Lichun Zou - Vienna VA, US
Ken Deng - Potomac MD, US
International Classification:
G01B005/28
Abstract:
A piezoelectric flexural sensing structure having increased sensitivity and decreased noise, without sacrifice of the sensor bandwidth. The structure is made up of a proof mass, a beam with a base and optionally having castellated bonding surfaces and two poled bonding mode PMN-PT crystal plates mounted on the beam.
