US Patent:
20050248003, Nov 10, 2005
Inventors:
Leonid Tsybeskov - Rockaway NJ, US
Andrei Sirenko - Basking Ridge NJ, US
International Classification:
H01L029/06
H01L021/36
US Classification:
257623000, 257627000, 438763000, 438478000
Abstract:
Methods and devices are provided in which vertically integrated devices are grown in the form of semiconductor (e.g., Ge, GaAs, InGaAs, etc.) one-dimensional nanowires with typical diameter of from about 5 nm to about 50 nm and aspect ratio of about 1:10. In one embodiment a nanometer-scale diameter pillar extending from a silicon substrate is employed as a “seed” for fabricating vertical, one-dimensional hetero-structures (and/or hetero-devices) containing semiconductor materials with lattice and thermal expansion mismatches to silicon.