Lalita A Balasubramanian

8532949, Sep 10, 2013

Oct 12, 2005

11/249144

Cho Huak Teh - Cupertino CA, US
Tommaso Torelli - Berkeley CA, US
Dominic David - Campbell CA, US
Chiuman Yeung - Sunnyvale CA, US
Michael Gordon Scott - Santa Cruz CA, US
Lalita A. Balasubramanian - Fremont CA, US
Lisheng Gao - Morgan Hill CA, US
Tong Huang - San Jose CA, US
Jianxin Zhang - Santa Clara CA, US
Michal Kowalski - Santa Cruz CA, US
Jonathan Oakley - Sunnyvale CA, US

KLA-Tencor Technologies Corp. - Milpitas CA

G01N 37/00

702 81, 250307, 3562372, 382145

Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.

20090080759, Mar 26, 2009

Sep 19, 2008

12/234201

Kris Bhaskar - San Jose CA, US
Chetana Bhaskar - San Jose CA, US
Ashok Kulkarni - San Jose CA, US
Eliezer Rosengaus - Palo Alto CA, US
Cecilia Campochiaro - Sunnyvale CA, US
Chris Maher - Campbell CA, US
Brian Duffy - San Jose CA, US
Aneesh Khullar - Sunnyvale CA, US
Alpa Kohli - Saratoga CA, US
Lalita A. Balasubramanian - Fremont CA, US
Santosh Bhattacharyya - San Jose CA, US
Mohan Mahadevan - Livermore CA, US

KLA-TENCOR CORPORATION - San Jose CA

G06K 9/00

382141

Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.