US Patent:
20210332491, Oct 28, 2021
Inventors:
- Waterbury CT, US
Kyle Whitten - Hamden CT, US
Vincent Paneccasio, JR. - Madison CT, US
Shaopeng Sun - Orange CT, US
Eric Yakobson - Cheshire CT, US
Jianwen Han - Southbury CT, US
Elie Najjar - Norwood MA, US
International Classification:
C25D 3/16
H01L 21/768
C25D 5/02
C25D 7/12
H01L 21/288
C25D 3/18
C25D 7/00
Abstract:
Compositions and methods of using such compositions for electroplating cobalt onto semiconductor base structures comprising submicron-sized electrical interconnect features are provided herein. The interconnect features are metallized by contacting the semiconductor base structure with an electrolytic composition comprising a source of cobalt ions, a suppressor, a buffer, and one or more of a depolarizing compound and a uniformity enhancer. Electrical current is supplied to the electrolytic composition to deposit cobalt onto the base structure and fill the submicron-sized features with cobalt. The method presented herein is useful for superfilling interconnect features.