Inventors:
Krishan S. Tarneja - Pittsburgh PA
Joseph E. Johnson - Pittsburgh PA
John Bartko - Pittsburgh PA
Assignee:
Westinghouse Electric Corporation - Pittsburgh PA
International Classification:
H01L 21263
Abstract:
The recovery charge of power diodes and thyristors is tailored and matched by irradiation through a major surface of the semiconductor body with a given radiation source, preferably of electron radiation, to a dosage corresponding to between about 1. times. 10. sup. 12 and 8. times. 10. sup. 12 electrons per centimeter square with 2 MeV electron radiation. Preferably, the recovery charge of each device of a group of a type of diode or thyristor is first measured, and the group divided into subgroups according to the measured recovery charge of each device. The devices of at least one subgroup is then irradiated with said given radiation source to dosages corresponding to between about 1. times. 10. sup. 12 and 8. times. 10. sup. 12 electrons per centimeter square with 2 MeV electron radiation, and the recovery charge of each irradiated device is again measured to determine the incremental change of recovery charge as a function of irradiation dosage.