US Patent:
20170178981, Jun 22, 2017
Inventors:
- San Jose CA, US
Dennis Ciplickas - San Jose CA, US
Tomasz Brozek - Morgan Hill CA, US
Jeremy Cheng - San Jose CA, US
Simone Comensoli - Darfo Boario Terme, IT
Indranil De - Mountain View CA, US
Kelvin Doong - Hsinchu City, TW
Hans Eisenmann - Tutzing, DE
Timothy Fiscus - New Galilee PA, US
Jonathan Haigh - Pittsburgh PA, US
Christopher Hess - Belmont CA, US
John Kibarian - Los Altos Hills CA, US
Sherry Lee - Monte Sereno CA, US
Marci Liao - Santa Clara CA, US
Sheng-Che Lin - Hsinchu City, TW
Hideki Matsuhashi - Santa Clara CA, US
Kimon Michaels - Monte Sereno CA, US
Conor O'Sullivan - Campbell CA, US
Markus Rauscher - Munich, DE
Vyacheslav Rovner - Pittsburgh PA, US
Andrzej Strojwas - Pittsburgh PA, US
Marcin Strojwas - Pittsburgh PA, US
Carl Taylor - Pittsburgh PA, US
Rakesh Vallishayee - Dublin CA, US
Larg Weiland - Hollister CA, US
Nobuharu Yokoyama - Tokyo, JP
International Classification:
H01L 21/66
Abstract:
Wafers, chips, or dies that contain fill cells with structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). Such NCEM-enabled fill cells may target/expose a variety of open-circuit, short-circuit, leakage, or excessive resistance failure modes. Such wafers, chips, or dies may include Designs of Experiments (“DOEs”), comprised of multiple NCEM-enabled fill cells, in at least two variants, all targeted to the same failure mode(s).