Kenneth Durden Phones & Addresses
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115 Cherry Wood Ct, Los Gatos, CA 95032
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Minneapolis, MN
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San Jose, CA
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Santa Clara, CA
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Saint Paul, MN
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Atlanta, GA
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Blaine, MN
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Jacksonville, FL
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12003 Jenkins St NE, Minneapolis, MN 55449 (763) 757-6141
Work
Position:
Administrative Support Occupations, Including Clerical Occupations
Education
Degree:
Associate degree or higher
Publications
Us Patents
All Surface Data For Use In Substrate Inspection
View pageUS Patent:
7593565, Sep 22, 2009
Filed:
Dec 7, 2005
Appl. No.:
11/296645
Inventors:
David Reich - Carver MN, US
Kenneth Durden - Vadnais Heights MN, US
Randall Shay - Chaska MN, US
Kenneth Durden - Vadnais Heights MN, US
Randall Shay - Chaska MN, US
Assignee:
Rudolph Technologies, Inc. - Flanders NJ
International Classification:
G06K 9/00
US Classification:
382145
Abstract:
A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
All Surface Data For Use In Substrate Inspection
View pageUS Patent:
7835566, Nov 16, 2010
Filed:
Sep 9, 2009
Appl. No.:
12/555837
Inventors:
David Reich - Carver MN, US
Kenneth Durden - Vadnais Heights MN, US
Randall Shay - Chaska MN, US
Kenneth Durden - Vadnais Heights MN, US
Randall Shay - Chaska MN, US
Assignee:
Rudolph Technologies, Inc. - Flanders NJ
International Classification:
G06K 9/00
US Classification:
382145
Abstract:
A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
System And Method Of Characterizing Micro-Fabrication Processes
View pageUS Patent:
20170254757, Sep 7, 2017
Filed:
May 22, 2017
Appl. No.:
15/601239
Inventors:
- Wilmington MA, US
Steven Knauber - Richardson TX, US
Jatinder Dhaliwal - Plano TX, US
Justin Miller - Bloomington MN, US
Michael Grant - Minneapolis MN, US
Kenneth Durden - Vadnais Heights MN, US
Steven Knauber - Richardson TX, US
Jatinder Dhaliwal - Plano TX, US
Justin Miller - Bloomington MN, US
Michael Grant - Minneapolis MN, US
Kenneth Durden - Vadnais Heights MN, US
Assignee:
Rudolph Technologies, Inc. - Wilmington MA
International Classification:
G01N 21/88
Abstract:
A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
System And Method Of Characterizing Micro-Fabrication Processes
View pageUS Patent:
20150316487, Nov 5, 2015
Filed:
Mar 14, 2014
Appl. No.:
14/213451
Inventors:
- Flanders NJ, US
Steven Knauber - Richardson TX, US
Jatinder Dhaliwal - Plano TX, US
Justin Miller - Bloomington MN, US
Michael Grant - Minneapolis MN, US
Kenneth Durden - Vadnais Heights MN, US
Steven Knauber - Richardson TX, US
Jatinder Dhaliwal - Plano TX, US
Justin Miller - Bloomington MN, US
Michael Grant - Minneapolis MN, US
Kenneth Durden - Vadnais Heights MN, US
Assignee:
Rudolph Technologies, Inc. - Flanders NJ
International Classification:
G01N 21/88
Abstract:
A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
Wikipedia References
