Inventors:
Sandeep Krishnan - Princeton NJ, US
Keng Moy - Basking Ridge NJ, US
Alexander I. Gurary - Bridgewater NJ, US
Matthew King - Montville NJ, US
Vadim Boguslavskiy - Princeton NJ, US
Steven Krommenhoek - Annandale NJ, US
Assignee:
Veeco Instruments Inc. - Plainview NY
International Classification:
1303