Inventors:
John J. Talvacchio - Churchill PA
Assignee:
Westinghouse Electric Corp. - Pittsburgh PA
International Classification:
H01L 2144
H01L 3912
Abstract:
This is a method for making an ohmic connection between a semiconductor and oxide superconductor, the connection being such that current can pass between the semiconductor and the superconductor without going through a degraded portion which is greater than the coherence length of the superconductor. The method can comprise depositing a buffer layer (which is essentially inert to the oxide superconductor) on a first portion of a semiconductor substrate, and depositing oxide superconductor on the barrier layer, and depositing a superconductor contact layer (e. g. of gold or silver) on the oxide superconductor, and depositing a semiconductor contact layer on a second portion of the semiconductor substrate (the semiconductor contact layer being, for example, of aluminum, or a refractory metal silicide); and depositing a layr (e. g. of gold or aluminum) on the semiconductor contact layer and on at least a portion of the superconductor contact layer to electrically connect the semiconductor contact laye and the superconductor contact layer. Alternately, the method can comprise depositing a buffer layer on a first portion of a substrate, and depositing oxide superconductor on the barrier layer, and depositing a superconductor contact layer on the oxide superconductor, and depositing a semiconductor on a second portion of the substrate, and depositing a semiconductor contact layer on the semiconductor, and depositing a layer on the semiconductor contact layer and on at least a portion of the superconductor contact layer to electrically connect the semiconductor contact layer and the superconductor contact layer.