Inventors:
John W. Sherohman - Livermore CA, US
Jick Hong Yee - Livermore CA, US
Kuang Jen J. Wu - Cupertino CA, US
Assignee:
The Regents of the University of California - Oakland CA
International Classification:
H01L 29/12
H01L 31/0328
US Classification:
257613, 257 22, 257190, 257201
Abstract:
For the first time, an aluminum antimonide (AlSb) single crystal substrate is utilized to lattice-match to overlying semiconductor layers. The AlSb substrate establishes a new design and fabrication approach to construct high-speed, low-power electronic devices while establishing inter-device isolation. Such lattice matching between the substrate and overlying semiconductor layers minimizes the formation of defects, such as threaded dislocations, which can decrease the production yield and operational life-time of 6. 1-Å family heterostructure devices.