Inventors:
John Michael Cotte - New Fairfield CT
Dario L. Goldfarb - Putnam Valley NY
Kenneth John McCullough - Fishkill NY
Wayne Martin Moreau - Wappinger NY
Keith R. Pope - Danbury CT
John P. Simons - Wappingers Falls NY
Charles J. Taft - Wappingers Falls NY
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
B08B 304
US Classification:
134 2, 134 3, 134 10, 134 11, 134 31, 134 34, 134 36, 134 37, 134 41, 134902, 34448, 34467, 34468, 34469, 34470, 34516, 34517
Abstract:
A process of drying a semiconductor wafer which includes at least one microelectric structure disposed thereon which includes contacting a water-containing thin film-covered semiconductor wafer with a composition which includes liquid or supercritical carbon dioxide and a surfactant.